ubc
Simulation and Analysis of Analog Circuit and PCM (Process Control Monitor) Test Structures in Circuit Design
2007-06-08
[Electronic ed.]
prv
Universitätsbibliothek Chemnitz
Universitätsbibliothek Chemnitz, Chemnitz
Fakultät für Informatik
PCM test structures are commonly used to check the produced wafers from the standpoint of the technologist. In general
these structures are managed inside the FAB and are focused on standard device properties. Hence their development and
analysis is not driven by analog circuit blocks, which are sensitive or often used. Especially for DFM/Y of analog circuits
the correlation between design and technology has to be defined. The knowledge of electrical behavior of test structures
helps to improve the designer's sensitivity to technological questions.
This paper presents a method to bring the PCM methodology into the analog circuit design to improve design performance,
yield estimation and technology correlation. We show how both analog circuit and PCM blocks can be simulated and
analyzed in the design phase.
004
500
Mikrosystemtechnik
Schaltungsentwurf
Analog circuit design
Process Control Monitor (PCM) methodology
Statistical Process Control
Wafer fabrication (FAB)
urn:nbn:de:swb:ch1-200700919
Technische Universität Chemnitz
pbl
Technische Universität Chemnitz, Chemnitz
Udo
Sobe
aut
Karl-Heinz
Rooch
aut
Dietmar
Mörtl
aut
Wolfram
Hardt
Prof. Dr.
edt
eng
urn:nbn:de:swb:ch1-200700815
0
qucosa:18723Dresdner Arbeitstagung Schaltungs- und Systementwurf - Band 5
born digital
in_proceeding